ISO/CD 4508
Surface chemical analysis--Scanning probe microscopy--Guidelines for the method and procedure for determining the effect of temperature on AFM nano-scale dimension measurements
Numéro de référence
ISO/CD 4508
ISO/CD 4508
Edition 1
© ISO 2024
Committee Draft
Résumé
This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).
Informations générales
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État actuel: ProjetStade: Mise à l'étude du CD [30.20]
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Edition: 1
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Comité technique :ISO/TC 201/SC 9
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