ISO 25178-604:2013 - Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Published (Edition 1, 2013)

This publication was last reviewed and confirmed in 2018. Therefore this version remains current.

Expected to be replaced by ISO 25178-604 within the coming months.

ISO 25178-604:2013

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Abstract

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

General information

Status
: Published

Publication date
: 2013-08

Stage
: International Standard to be revised [90.92]
Edition
: 1

Number of pages
: 41
Technical Committee :
ISO/TC 213

ICS :
17.040.20
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