Abstract
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
General information
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Status: WithdrawnPublication date: 2013-08Stage: Withdrawal of International Standard [95.99]
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Edition: 1Number of pages: 41
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Technical Committee :ISO/TC 213ICS :17.040.20
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Life cycle
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Now
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Revised by
PublishedISO 25178-604:2025