Reference number
ISO 14644-10:2013
© ISO 2024
ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Edition 1
2013-03
Withdrawn
Withdrawn (Edition 1, 2013)

Abstract

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

General information

  • Status
     : Withdrawn
    Publication date
     : 2013-03
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 30
  • Technical Committee :
    ISO/TC 209
    ICS :
    13.040.35 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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