Reference number
ISO 22278:2020
International Standard
ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
Edition 1
2020-08
Read sample
ISO 22278:2020
73015
Published (Edition 1, 2020)

ISO 22278:2020

ISO 22278:2020
73015
Language
Format
CHF 151
Convert Swiss francs (CHF) to your currency

Abstract

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

General information

  •  : Published
     : 2020-08
    : International Standard published [60.60]
  •  : 1
     : 29
  • ISO/TC 206
    81.060.30 
  • RSS updates

Got a question?

Check out our Help and Support