This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in -.
Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments.
Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in -.
This document does not include procedures for area-integrating methods, although those are also stated in -. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.