Status : Published
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Abstract

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

General information

  • Status
     : Published
    Publication date
     : 2023-12
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 12
  • Technical Committee :
    ISO/TC 112
    ICS :
    23.160 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

8
Decent Work and Economic Growth
9
Industry, Innovation and Infrastructure
12
Responsible Consumption and Production

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