ISO 21360-6:2023
p
ISO 21360-6:2023
80497
Status : Published
en
Format Language
std 1 61 PDF + ePub
std 2 61 Paper
  • CHF61
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Abstract

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

General information

  •  : Published
     : 2023-12
    : International Standard published [60.60]
  •  : 1
     : 12
  • ISO/TC 112
    23.160 
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