ISO/CD 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/CD 23131-3
Edition 1
Committee Draft
u
ISO/CD 23131-3
83903
A draft is being reviewed by the committee.

Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  •  : Under development
    : CD consultation initiated [30.20]
  •  : 1
  • ISO/TC 107
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