ISO 15632:2002
Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
Reference number
ISO 15632:2002
Edition 1
2002-12
© ISO 2024
Withdrawn
Withdrawn (Edition 1, 2002)

Abstract

ISO 15632 defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid state ionization. It specifies minimum requirements for such spectrometers attached to an electron probe microanalyser (EPMA) or a scanning electron microscope (SEM). Realization of the analysis is outside the scope of this International Standard.

General information

  • Status
     : Withdrawn
    Publication date
     : 2002-12
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 8
  • Technical Committee :
    ISO/TC 202
    ICS :
    37.020  71.040.99 
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